台阶仪 Stylus Profiler – DektakXT
2013-12-17 14:07:44    点击:


Name: BrukerStylus Profiler (Model: Dektak XT )

名称:布鲁克台阶仪(型号:Dektak XT )

Work principle:The Dektak XT system takes measurements electromechanically by moving a diamond-tipped stylus over the sample surface according to a user-programmed scan length, speed, and stylus force. The stylus is linked to a Linear Variable Differential Transformer (LDVT), which produces and processes electrical signals that correspond to surface variations of the sample. After being converted to digital format, these surface variations are stored for display and analysis.

工作原理:探针根据设定的扫描长度、速度和接触力在样品表面移动,随着样品表面的变化,链接在探针上的线性差动变压器接收处理变化的电信号。将变化的电信号转换成数字信号后,就能重现样品表面的起伏变化。

Application

– TheDektak XT stylus surface profiler is an advanced thin and thick film step height, measurement tool.

– In addition to profiling surface topography and waviness, the system measures roughness in the nanometer range.

– Additionally, the Dektak XT system can produce three-dimensional measurements and analyses.

用途

–可以测量薄(厚)膜台阶高度(纳米、微米级别);

–可以测量样品表面形貌和起伏度,也可以测量纳米级样品表面粗糙度;

–可以测量并分析样品的三维形貌;

Technicalindex

– Step height repeatability 5  angstrom, 1 sigma on 1μm step;

–  Vertical bit resolution of 1 angstrom on 6.5 um range;

– Motorized XY stage with 6 inches of travel, motorized 360 degree rotation;

– Scan length from 50μm to 55mm with 120,000 data points per scan;

– Stylus force from 1 mg to 15 mg;

– Vertical measurement range: 1mm maximun;

– 30 analytical function, plus waviness cut-off filters;

– 64-bit parallel processing architecture, best measurement and easy operation.

技术指标

–台阶高度重现性低于5Å ,1δ(1000Å标准台阶);

–垂直分辨率为1Å(在6.5μm范围内);

–自动样品台,XY行程达150mm,自动360°旋转;

–扫描长度50μm至55mm,可达120,000个数据点扫描;

–探针加力范围1mg至15mg;

–垂直测量范围可达1mm;

– 30种分析功能,另加波纹过滤器;

– 64位并行处理构架,测量效率高,操作简易。