桌面电镜 SEM
2015-04-14 12:53:35    点击:

设备名称:桌面电镜

规格型号: FE-SEM 8500 ,Agilent

设备位置:Basement


设备描述:

此设备为紧凑型场发射扫描电镜,成像分辨率优于10nm。低加速电压成像,有效减少电荷累积,非导电样品,无须喷金喷碳处理,便可直接进行观察。

工艺能力:

•  电子枪:场发射电子源

•  加速电压:0.5 to 2 kV 

•  束流:0.2 to 1 nA 

•  分辨率:<10 nm (@1kV)

•  放大倍数:250 to 130,000x  (2048×2048pixels) 

•  样品尺寸:最大 100×60 mm

   •  样品高度:最大 30 mm


Equipment name: Desktop SEM

Model/Vendor: FE-SEM 8500 ,Agilent

Location: Basement


Description:

The equipment is compact field emission scanning electron microscopy, the imaging resolution is better than 10 nm. Low voltage imaging can effectively reduce the charge accumulation. The non-conductive samples can be observed directly without spraying gold and carbon.

Capability :

•  Electronic Gun : Field emission electron sources 

•  Acceleration Voltage :0.5 to 2 kV 

•  Beam Current :0.2 to 1 nA

•  Resolution :<10 nm (@1kV)

•  Magnification:250 to 130,000x  (2048×2048pixels)

•  Sample size :Max 100×60 mm

•  Sample height :Max 30 mm