透反射显微镜 Leica DM8000
2016-12-15 17:09:04    点击:

 

基本信息

DM8000M光学显微镜系统能够对不同尺寸,不同特征的光刻加工结构及掩膜进行快速观察和准确表征。配备有UV光源,放大倍数最大可达1500倍,配备0.7倍缩小镜,其视野可达40mm,适合对基片的大面积查看。

主要性能指标:

反射光:明场,暗场,偏光,微分干涉,斜照明,紫外

透射光:明场,偏光

载物台尺寸:8英寸

光源:LED光源(50000小时)

物镜:5X, 10X, 20X, 50X, 100X

测绘软件:Leica Application Suite


General Description:

The Leica DM8000 Microscope can be used for sample inspection in reflection or transmission mode. The system provide a fast, accurate and ergonomic Inspection, process control and defect analysis of Wafers.


System Capabilities:

Full LED incident light illumination
Cube Assemblies: Bright-Field (BF), Dark-Field (DF), Differential Interference Contrast (DIC), qualitative POL, oblique illumination, UV, OUV

Objectives: 5X, 10X, 20X, 50X, 100X

SoftwareLeica Application Suite